The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2010
Filed:
Apr. 20, 2007
John Perkins, Boulder, CO (US);
Marinus Franciscus Antonius Maria Van Hest, Lakewood, CO (US);
David Ginley, Evergreen, CO (US);
Matthew Taylor, Golden, CO (US);
George A. Neuman, Holland, MI (US);
Henry A. Luten, Holland, MI (US);
Jeffrey A. Forgette, Hudsonville, MI (US);
John S. Anderson, Holland, MI (US);
John Perkins, Boulder, CO (US);
Marinus Franciscus Antonius Maria Van Hest, Lakewood, CO (US);
David Ginley, Evergreen, CO (US);
Matthew Taylor, Golden, CO (US);
George A. Neuman, Holland, MI (US);
Henry A. Luten, Holland, MI (US);
Jeffrey A. Forgette, Hudsonville, MI (US);
John S. Anderson, Holland, MI (US);
Alliance for Sustainable Energy, LLC, Golden, CO (US);
Abstract
Metal oxide thin films and production thereof are disclosed. An exemplary method of producing a metal oxide thin film may comprise introducing at least two metallic elements and oxygen into a process chamber to form a metal oxide. The method may also comprise depositing the metal oxide on a substrate in the process chamber. The method may also comprise simultaneously controlling a ratio of the at least two metallic elements and a stoichiometry of the oxygen during deposition. Exemplary amorphous metal oxide thin films produced according to the methods herein may exhibit highly transparent properties, highly conductive properties, and/or other opto-electronic properties.