The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2010
Filed:
Apr. 03, 2008
Gaofeng Wang, Sunnyvale, CA (US);
Chih-chang Chen, Cupertino, CA (US);
Yahong Yao, Palo Alto, CA (US);
Liji Huang, San Jose, CA (US);
Gaofeng Wang, Sunnyvale, CA (US);
Chih-Chang Chen, Cupertino, CA (US);
Yahong Yao, Palo Alto, CA (US);
Liji Huang, San Jose, CA (US);
Siargo, Inc., San Jose, CA (US);
Abstract
A mass flow sensor is supported on an N or P-type silicon substrate with orientation <100>. This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range.