The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2010
Filed:
Aug. 14, 2007
Fahrettin L. Degertekin, Atlanta, GA (US);
Fahrettin L. Degertekin, Atlanta, GA (US);
Georgia Tech Research Corporation, Atlanta, GA (US);
Abstract
An atomic force microscope sensing structure includes a substrate, a flexible membrane and an actuating element. The flexible membrane has a first end that is clamped to the substrate and an opposite second end that is clamped to the substrate. A central portion of the membrane and the substrate define a first gap width therebetween. A peripheral portion of the membrane and the substrate define a second gap width therebetween. The first gap width is different from the second gap width. The actuating element is disposed at least adjacent to the first end and the second end and is configured to displace the membrane relative to the substrate.