The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 06, 2010

Filed:

Dec. 05, 2007
Applicants:

Osamu Tsuboi, Kawasaki, JP;

Yoshihiro Mizuno, Kawasaki, JP;

Satoshi Ueda, Kawasaki, JP;

Ippei Sawaki, Kawasaki, JP;

Hisao Okuda, Kawasaki, JP;

Fumio Yamagishi, Kawasaki, JP;

Hiromitsu Soneda, Kawasaki, JP;

Norinao Kouma, Kawasaki, JP;

Inventors:

Osamu Tsuboi, Kawasaki, JP;

Yoshihiro Mizuno, Kawasaki, JP;

Satoshi Ueda, Kawasaki, JP;

Ippei Sawaki, Kawasaki, JP;

Hisao Okuda, Kawasaki, JP;

Fumio Yamagishi, Kawasaki, JP;

Hiromitsu Soneda, Kawasaki, JP;

Norinao Kouma, Kawasaki, JP;

Assignee:

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); H02N 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The micro-actuation element (X) includes a movable unit (), a frame () and a coupler () for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (-), such as a core conduction layer (), and insulation layers () intervening between the electroconductive layers (-). The movable unit () includes a first structure originating in the core conduction layer (). The frame () includes a second structure originating in the core conduction layer (). The coupler () includes a plurality of electrically separated torsion bars () that originate in the core conduction layer () and are connected continuously to the first structure and the second structure.


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