Optical displacement meter, optical displacement measuring method, optical displacement measuring program, computer-readable recording medium, and device that records the program

Abstract

The present invention provides an optical displacement meter in which light receiving elements are disposed two-dimensionally, capable of stably obtaining a reception light amount in accordance with a work. The optical displacement meter includes: a two-dimensional light receiving device for receiving reflection light of strip-line-shaped light from an object to be measured and outputting the received reflection light as a reception light signal in each of positions in a first direction; reception light level control means for controlling any of parameters of at least operation amounts including a light emission amount of a projector and amplification factor of an amplifier so that a distribution of peaks in the first direction of amplification signals obtained by the amplifier lies in a predetermined range; and mode switching means for switching between a measuring mode of measuring displacement of an object to be measured and a setting mode of setting an operation amount of the reception light level control means. In the setting mode, strip-line-shaped light is emitted from the projector to the object to be measured, a distribution state of peaks of the amplification signals in the positions in the first direction is measured, and the reception light level control means can adjust the operation amount in accordance with the distribution state in the first direction.