The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
Feb. 27, 2007
Hee-moon Jeong, Yongin-si, KR;
Seok-jin Kang, Yongin-si, KR;
Jin-woo Cho, Yongin-si, KR;
Young-chul Ko, Yongin-si, KR;
Hyun-ku Jeong, Yongin-si, KR;
Hee-moon Jeong, Yongin-si, KR;
Seok-jin Kang, Yongin-si, KR;
Jin-woo Cho, Yongin-si, KR;
Young-chul Ko, Yongin-si, KR;
Hyun-ku Jeong, Yongin-si, KR;
Samsung Electro-Mechanics Co., Ltd, Suwon-si, KR;
Abstract
A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.