The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
Jan. 07, 2008
Applicants:
Makoto Takahashi, Kawasaki, JP;
Kouichi Nagai, Kawasaki, JP;
Inventors:
Makoto Takahashi, Kawasaki, JP;
Kouichi Nagai, Kawasaki, JP;
Assignee:
Fujitsu Semiconductor Limited, Yokohama, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/485 (2006.01);
U.S. Cl.
CPC ...
Abstract
According to the method for manufacturing a semiconductor device, a surface of a lower insulating film () is planarized by CMP or the like, and an upper insulating film () and a protective metal film () are formed on the lower insulating film (). Accordingly, the upper insulating film () and the protective metal film () are formed in such a manner they have an excellent coverage and the water/hydrogen blocking capability of the upper insulating film () and the protective metal film () is maximized.