The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
May. 15, 2007
Myung-ok Kim, Ichon-shi, KR;
Tae-hyoung Kim, Ichon-shi, KR;
Myung-Ok Kim, Ichon-shi, KR;
Tae-Hyoung Kim, Ichon-shi, KR;
Hynix Semiconductor Inc., Ichon-shi, Kyoungki-do, KR;
Abstract
A method for fabricating a bulb-shaped recess pattern includes: forming an etch barrier layer over a substrate; forming a hard mask pattern in which a first polymer is attached to sidewalls of the hard mask pattern over the etch barrier layer; sequentially etching the etch barrier layer and the substrate to form a recess pattern in which a second polymer is attached to sidewalls of the recess pattern; removing the first and second polymers and the hard mask pattern; forming a plurality of spacers exposing a bottom portion of the recess pattern; and etching the exposed bottom portion of the recess pattern to form a ball pattern.