The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
Feb. 16, 2007
Applicant:
Luis-felipe Giles, Munich, DE;
Inventor:
Luis-Felipe Giles, Munich, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/425 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing a semiconductor element. A dislocation region is formed between a first layer and a second layer, the dislocation region including a plurality of dislocations. First interstitials in the first layer are at least partially eliminated using the dislocations in the dislocation region. Vacancies are formed in the second layer. Second interstitials in the second layer are at least partially eliminated using the vacancies in the second layer.