The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 06, 2010

Filed:

Mar. 03, 2006
Applicants:

Shin Hashimoto, Itami, JP;

Makoto Kiyama, Itami, JP;

Takashi Sakurada, Osaka, JP;

Tatsuya Tanabe, Itami, JP;

Kouhei Miura, Osaka, JP;

Tomihito Miyazaki, Osaka, JP;

Inventors:

Shin Hashimoto, Itami, JP;

Makoto Kiyama, Itami, JP;

Takashi Sakurada, Osaka, JP;

Tatsuya Tanabe, Itami, JP;

Kouhei Miura, Osaka, JP;

Tomihito Miyazaki, Osaka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/338 (2006.01);
U.S. Cl.
CPC ...
Abstract

Affords high electron mobility transistors having a high-purity channel layer and a high-resistance buffer layer. A high electron mobility transistoris provided with a supporting substratecomposed of gallium nitride, a buffer layercomposed of a first gallium nitride semiconductor, a channel layercomposed of a second gallium nitride semiconductor, a semiconductor layercomposed of a third gallium nitride semiconductor, and electrode structures (a gate electrode, a source electrodeand a drain electrode) for the transistor. The band gap of the third gallium nitride semiconductor is broader than that of the second gallium nitride semiconductor. The carbon concentration Nof the first gallium nitride semiconductor is 4×10cmor more. The carbon concentration Nof the second gallium nitride semiconductor is less thancm.


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