The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7748970 B1

PDF
Full Text
Expired
Date of Patent:
Jul. 06, 2010

Filed:

Sep. 28, 2007
Applicant:

Tea-jin Park, Gyeonggi-do, KR;

Inventor:

Tea-Jin Park, Gyeonggi-do, KR;

Assignee:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F01C 1/18 (2006.01);
U.S. Cl.
CPC ...
Abstract

In an embodiment, a vacuum pump is capable of preventing adhesion of by-products to its surfaces. The vacuum pump includes a stator. The stator includes a cylinder wall and a pair of diaphragms disposed at opposite ends of the stator. A rotary shaft passes through the diaphragms, and a lobe is attached to the rotary shaft in the stator. The lobe may include a fluid port, and the fluid port may be disposed in sidewalls of the lobe to face the diaphragms. The rotary shaft may include a fluid supply path in communication with the fluid port.


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