The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
Oct. 30, 2007
Jb Price, Los Gatos, CA (US);
Jed Keller, Los Gatos, CA (US);
Laurence Dulmage, Nevada City, CA (US);
David Cheng, Sunnyvale, CA (US);
JB Price, Los Gatos, CA (US);
Jed Keller, Los Gatos, CA (US);
Laurence Dulmage, Nevada City, CA (US);
David Cheng, Sunnyvale, CA (US);
Crossing Automation, Inc., Mountain View, CA (US);
Abstract
A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.