The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2010
Filed:
Mar. 16, 2005
Applicant:
Tetsunori Otaguro, Tokyo, JP;
Inventor:
Tetsunori Otaguro, Tokyo, JP;
Assignee:
Hirata Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
Abstract
A precision positioning devicehaving degrees of freedom along multi-axial directions includes a single unitary structureand a plurality of expansion/contraction actuators, and. Movements of an object-to-be-positioned in the axial directions are effected through such elastic deformations of the unitary structureas to move the object-to-be-positioned only in the axial directions. Forces to generate the elastic deformations are based on expansion/contraction of the expansion/contraction actuators, andincorporated in the unitary structure. The expansion/contraction actuators, andcan be formed of piezoelectric elements.