The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 29, 2010

Filed:

May. 30, 2006
Applicant:

Ken Utagawa, Yokohama, JP;

Inventor:

Ken Utagawa, Yokohama, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/00 (2006.01); G01B 9/04 (2006.01); G03B 13/00 (2006.01); G03B 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An image forming state detection device comprises a micro-lens array that is disposed at a position set apart from a predetermined focal plane of an image forming optical system by a specific distance and includes a plurality of micro-lenses arrayed with a predetermined pitch, a light-receiving portion array that includes a plurality of light-receiving portions each corresponding to one of the micro-lenses in the micro-lens array and receives an image on the predetermined focal plane via the individual micro-lenses, a signal string extracting means that extracts a pair of signal strings corresponding to images, formed with light fluxes having passed through different pupil areas of the image forming optical system, based upon light reception outputs obtained from the plurality of light-receiving portions, and an image forming state calculating means that calculates an image forming state at the image forming optical system by detecting an offset with regard to the phases of the pair of signal strings extracted by the signal string extracting means.


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