The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2010
Filed:
Aug. 05, 2008
Kei Masunishi, Kawasaki, JP;
Akihiro Koga, Tokyo, JP;
Ryo Furukawa, Kawasaki, JP;
Osamu Nishimura, Kawasaki, JP;
Akio Kobayashi, Tokyo, JP;
Hiroyuki Kawashima, Tokyo, JP;
Kei Masunishi, Kawasaki, JP;
Akihiro Koga, Tokyo, JP;
Ryo Furukawa, Kawasaki, JP;
Osamu Nishimura, Kawasaki, JP;
Akio Kobayashi, Tokyo, JP;
Hiroyuki Kawashima, Tokyo, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Kabushiki Kaisha Topcon, Tokyo, JP;
Abstract
A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; and a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening. The electrodes are electrically insulated each other by a plurality of grooves radially extending from a region which includes a position corresponding to a center of the opening.