The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2010
Filed:
Feb. 12, 2007
John W. Berthold, Salem, OH (US);
Tiansheng Zhou, Edmonton, CA;
Ira Jeffrey Bush, Van Nuys, CA (US);
Fred Mcnair, Van Nuys, CA (US);
John W. Berthold, Salem, OH (US);
Tiansheng Zhou, Edmonton, CA;
Ira Jeffrey Bush, Van Nuys, CA (US);
Fred McNair, Van Nuys, CA (US);
Halliburton Energy Services, Inc., Carrollton, TX (US);
Abstract
The present invention relates to an optic seismic MEMS sensor. More specifically, a proof mass is supported by a frame having supporting beams. The proof mass is positioned within the frame and has a hinged attachment to the beams. The proof mass has a sensor gap having a first reflector and a second reflector positioned at opposing ends of the sensor gap. An optical fiber injects light into the sensor gap and light is reflected to determine seismic movement of the proof mass with respect to the frame. Stops are provided for limiting the movement of the proof mass to minimize strain on the attachment of the beams and the proof mass.