The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2010
Filed:
Sep. 01, 2005
Applicants:
Takehito Okabe, Atsugi, JP;
Nobuhiko Sato, Sagamihara, JP;
Makoto Kurotobi, Yokohama, JP;
Kenichi Takeda, Yokohama, JP;
Toshihiro Ifuku, Yokohama, JP;
Inventors:
Takehito Okabe, Atsugi, JP;
Nobuhiko Sato, Sagamihara, JP;
Makoto Kurotobi, Yokohama, JP;
Kenichi Takeda, Yokohama, JP;
Toshihiro Ifuku, Yokohama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23P 17/00 (2006.01); G01D 15/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for manufacturing an inkjet head includes providing a piezoelectric substrate having a porous structure, a diaphragm on the porous structure, and a piezoelectric substance layer on the diaphragm, and forming a cavity by etching out the porous structure from the piezoelectric substrate.