The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2010
Filed:
May. 03, 2007
Chin-tien Yang, Taipei County, TW;
Ming-fang Hsu, Taipei, TW;
Sheng-li Chang, Hsinchu County, TW;
Tzuan-ren Jeng, Hsinchu, TW;
Chin-Tien Yang, Taipei County, TW;
Ming-Fang Hsu, Taipei, TW;
Sheng-Li Chang, Hsinchu County, TW;
Tzuan-Ren Jeng, Hsinchu, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
A method for fabricating a disc stamper is provided. First, a substrate is provided. Next, a layer of a coatable inorganic material is coated on the substrate, wherein the coatable inorganic material is an oxide, in which the chemical element constitution is more than one element selected from the group consisting of Te, Al, Zr, and Ti. Next, a laser beam is utilized to perform direct write on the layer of the coatable inorganic material to form a relief pattern. Thereafter, a metal layer is electroplated on the relief pattern. Next, the metal layer is separated from the relief pattern. The layer of the coatable inorganic material is utilized to form the relief pattern, so that it is more compatibility to equipment apparatus and lower cost in contrast with sputtered PTM process.