The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2010
Filed:
Jul. 31, 2007
Applicants:
Dirk Manger, Dresden, DE;
Stephan Wege, Dresden, DE;
Rolf Weis, Dresden, DE;
Christoph Noelscher, Nuremberg, DE;
Inventors:
Dirk Manger, Dresden, DE;
Stephan Wege, Dresden, DE;
Rolf Weis, Dresden, DE;
Christoph Noelscher, Nuremberg, DE;
Assignee:
Qimonda AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01R 43/00 (2006.01); H01L 21/02 (2006.01); H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
Abstract
In one aspect, a method of forming a structure on a substrate is disclosed. For example, the method includes forming a first mask layer and a second mask layer, modifying a material property in regions of the first and second mask layers, and forming the structure based on the modified regions.