The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2010
Filed:
Mar. 09, 2007
Pezhman Monadgemi, Fremont, CA (US);
Emmanuel P. Quevy, El Cerrito, CA (US);
Roger T. Howe, Los Gatos, CA (US);
Pezhman Monadgemi, Fremont, CA (US);
Emmanuel P. Quevy, El Cerrito, CA (US);
Roger T. Howe, Los Gatos, CA (US);
Silicon Clocks, Inc., Fremont, CA (US);
Abstract
Low temperature, multi-layered microshells for encapsulation of devices such as MEMS and microelectronics. The microshells may include a perforated pre-sealing layer, below which a sacrificial layer is accessed, and a sealing layer to close the perforation in the pre-sealing layer after the sacrificial material is removed. The pre-sealing layer includes a large surface area getter layer to remove contaminants from the space ultimately enclosed by the microshell to improve the pressure control and cleanliness of the microshell.