The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2010
Filed:
Apr. 20, 2005
Applicants:
Masashi Kitazawa, Ina, JP;
Ryo Ota, Minamiminowamura, JP;
Masaki Tanemura, Owariasahi, JP;
Inventors:
Assignee:
Olympus Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 5/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
An SPM cantilever of the present invention including: a support portion () fabricated by processing a single crystal silicon wafer; a lever portion () formed in a manner extended from the support portion; a probe () disposed at a free end side of the lever portion; a coating of graphite film () covering all over the side on which the probe is formed and the entire probe; and a piece of thin line () consisting of a carbon nanofiber (CNF) or carbon nanotube (CNT) or graphite nanofiber (GNF) grown/formed from the graphite film at a probe terminal end portion ().