The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2010
Filed:
Mar. 06, 2007
Satoshi Sakai, Yokohama, JP;
Shigenori Tsuruga, Yokohama, JP;
Hideo Yamakoshi, Yokohama, JP;
Shizuma Kuribayashi, Yokohama, JP;
Minoru Danno, Yokohama, JP;
Hiroshi Futami, Yokohama, JP;
Noriko Yamazaki, Yokohama, JP;
Satoshi Sakai, Yokohama, JP;
Shigenori Tsuruga, Yokohama, JP;
Hideo Yamakoshi, Yokohama, JP;
Shizuma Kuribayashi, Yokohama, JP;
Minoru Danno, Yokohama, JP;
Hiroshi Futami, Yokohama, JP;
Noriko Yamazaki, Yokohama, JP;
Mitsubishi Heavy Industries, Ltd., Tokyo, JP;
Abstract
An optical system has fluoride compounds provided in an environment exposed by vacuum ultraviolet light or plasma light, which has higher photon energy than an absorption wavelength of a base stock of the optical system. 1-layer of a protective film of SiOor metal oxides having a film thickness of 2-20 nm is formed at least on the light irradiation side (inner side) of the optical system to prevent the stripping of the fluorine atoms from the surface of the optical system. In addition, the protective film is a 1-layer film selected from one of SiO, MgO, TiO, or ZrO.