The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2010
Filed:
Sep. 16, 2008
Jun Nishikawa, Tokyo, JP;
Yutaka Hayano, Tokyo, JP;
Jun Nishikawa, Tokyo, JP;
Yutaka Hayano, Tokyo, JP;
National Institutes of Natural Sciences, Tokyo, JP;
Abstract
In a wavefront sensor, an optical wavefront to be measured is split into a first optical path and a second optical path. A wavefront Win the first optical path is transmitted through a first compensation member, and a wavefront Win the second optical path is transmitted through a second compensation member. Wavefronts Wand Ware mixed together by a semi-transparent mirrorwith the wavefronts being displaced from each other by a shearing quantity S to form an interference fringe. An optical path difference that occurs between two wavefronts W' and W′ which reach the interference measurement plane M in a state where the wavefronts are inclined due to the arrival direction of the optical wavefront to be measured is compensated when the wavefronts W′ and W′ are transmitted through the first and second optical path difference compensation membersand, respectively.