The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2010
Filed:
Jun. 29, 2007
Applicants:
Jeffrey Allen Hanson, Allen, TX (US);
Lee M. Loewenstein, Dallas, TX (US);
Monte Allan Douglas, Richardson, TX (US);
Inventors:
Jeffrey Allen Hanson, Allen, TX (US);
Lee M. Loewenstein, Dallas, TX (US);
Monte Allan Douglas, Richardson, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); G01N 23/207 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing a semiconductor device includes placing a sample of a liquid chemical containing a contaminant on a substantially impurity-free surface of a substrate. The liquid chemical is evaporated, leaving the contaminant on the surface. The contaminant is concentrated in a scanning solution, which is then evaporated to form a residue. A concentration of the contaminant in the residue is determined.