The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2010
Filed:
May. 03, 2007
Jeffery L. Stricker, Narberth, PA (US);
Michael B. Abrams, Bala Cynwyd, PA (US);
Roman Y. Korotkov, King of Prussia, PA (US);
Gary S. Silverman, Chadds Ford, PA (US);
Ryan C. Smith, Collegeville, PA (US);
Jeffery L. Stricker, Narberth, PA (US);
Michael B. Abrams, Bala Cynwyd, PA (US);
Roman Y. Korotkov, King of Prussia, PA (US);
Gary S. Silverman, Chadds Ford, PA (US);
Ryan C. Smith, Collegeville, PA (US);
Pilkington Group Limited, St. Helens, Merseyside, GB;
Arkema, Inc., King of Prussia, PA (US);
Abstract
The invention described and claimed herein relates to a chemical vapor deposition process for depositing a zinc oxide coating on a substrate by delivering two gaseous precursor streams to a surface of the substrate, and mixing the gaseous precursor streams at the substrate surface for a time sufficiently short so as to form a zinc oxide coating at a deposition rate greater than 5 nm/second.