The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2010
Filed:
Aug. 21, 2006
Benjamin N. Eldridge, Danville, CA (US);
John K. Gritters, Livermore, CA (US);
Igor Y. Khandros, Orinda, CA (US);
Rod Martens, Livermore, CA (US);
Gaetan L. Mathieu, Varennes, CA;
Benjamin N. Eldridge, Danville, CA (US);
John K. Gritters, Livermore, CA (US);
Igor Y. Khandros, Orinda, CA (US);
Rod Martens, Livermore, CA (US);
Gaetan L. Mathieu, Varennes, CA;
FormFactor, Inc., Livermore, CA (US);
Abstract
A carbon nanotube contact structure can be used for making pressure connections to a DUT. The contact structure can be formed using a carbon nanotube film or with carbon nanotubes in solution. The carbon nanotube film can be grown in a trench in a sacrificial substrate in which a contact structure such as a beam or contact element is then formed by metal plating. The film can also be formed on a contact element and have metal posts dispersed therein to provide rigidity and elasticity. Contact structures or portions thereof can also be plated with a solution containing carbon nanotubes. The resulting contact structure can be tough, and can provide good electrical conductivity.