The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2010
Filed:
Apr. 04, 2006
Jong-seok Kim, Hwaseong-gun, KR;
Sang-wook Kwon, Seongnam-si, KR;
Dong-kyun Kim, Suwon-si, KR;
Che-heung Kim, Yongin-si, KR;
Sang-hun Lee, Seoul, KR;
Young-tack Houng, Suwon-si, KR;
Chang-seung Lee, Yongin-si, KR;
In-sang Song, Seoul, KR;
Jong-seok Kim, Hwaseong-gun, KR;
Sang-wook Kwon, Seongnam-si, KR;
Dong-kyun Kim, Suwon-si, KR;
Che-heung Kim, Yongin-si, KR;
Sang-hun Lee, Seoul, KR;
Young-tack Houng, Suwon-si, KR;
Chang-seung Lee, Yongin-si, KR;
In-sang Song, Seoul, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
An RF MEMS switch and a method for fabricating the same are disclosed, in which the RF MEMS device is down driven at a low voltage using a piezoelectric effect. The RF MEMS switch includes a substrate provided with RF signal lines and a cavity, a cantilever positioned on the cavity, having one end fixed to the substrate, and a contact pad connecting the RF signal lines with the cantilever in contact with the RF signal lines when the cantilever is down driven.