The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2010
Filed:
Mar. 21, 2006
Liang-you Jiang, Danshuei Township, Taipei County, TW;
Yu-yang Chang, Jhudong Township, Hsinchu County, TW;
Lih-hsiung Chan, Kaohsiung, TW;
Liang-You Jiang, Danshuei Township, Taipei County, TW;
Yu-Yang Chang, Jhudong Township, Hsinchu County, TW;
Lih-Hsiung Chan, Kaohsiung, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
A method for fabricating a cathode plate of a field emission display is disclosed. A patterned electrode layer is formed on a surface of the substrate, and emitters for absorbing a light source are formed on the patterned electrode layer. Next, a dielectric layer is formed over the substrate, and a patterned gate layer is formed on the dielectric layer. Thereafter, a backside exposure process is carried out using the emitters as a mask, and portions of the dielectric layer not masked by the emitters react with a light used in the backside exposure process. Next, portions of the dielectric layer not exposed to the light and portions of the gate layer are removed to form via holes and gate holes.