The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 01, 2010

Filed:

Jan. 03, 2007
Applicants:

Sailesh Chittipeddi, Allentown, PA (US);

Sailesh Merchant, Macungie, PA (US);

Inventors:

Sailesh Chittipeddi, Allentown, PA (US);

Sailesh Merchant, Macungie, PA (US);

Assignee:

Agere Systems Inc., Allentown, PA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/311 (2006.01); H01L 21/4763 (2006.01); H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract

An integrated circuit structure includes a metallization level having a dual damascene trench structure formed in a layer of dielectric material. The dielectric material has an upper surface with a first degree of planarity. The metallization level includes a conductive layer formed in the trench structure with an upper surface characterized by the same level of planarity as the dielectric material upper surface. In certain embodiments, the upper surface of the conductive layer is substantially coplanar with the dielectric material upper surface.


Find Patent Forward Citations

Loading…