The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2010
Filed:
Feb. 24, 2006
Saravjeet Singh, Santa Clara, CA (US);
Hooman Hafezi, Redwood City, CA (US);
Manoocher Birang, Los Gatos, CA (US);
Aron Rosenfeld, Palo Alto, CA (US);
Joseph Behnke, San Jose, CA (US);
Saravjeet Singh, Santa Clara, CA (US);
Hooman Hafezi, Redwood City, CA (US);
Manoocher Birang, Los Gatos, CA (US);
Aron Rosenfeld, Palo Alto, CA (US);
Joseph Behnke, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and apparatus for plating a metal onto a substrate. One embodiment of the invention provides an apparatus for electrochemically plating a substrate. The apparatus comprises a fluid basin configured to retain a plating solution therein, an anode assembly disposed in the fluid basin, a substrate support member configured to support the substrate and contact the substrate electrically, and an encased auxiliary electrode assembly disposed in the fluid basin. The encased auxiliary electrode assembly generally comprises an auxiliary electrode disposed in a protective tube.