The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 25, 2010

Filed:

Jan. 31, 2006
Applicants:

Yun-kwon Park, Dongducheon-si, KR;

Sang-wook Kwon, Seongnam-si, KR;

Duck-hwan Kim, Goyang-si, KR;

Jong-seok Kim, Gyeonggi-do, KR;

Sung-hoon Choa, Seoul, KR;

In-sang Song, Seoul, KR;

Inventors:

Yun-kwon Park, Dongducheon-si, KR;

Sang-wook Kwon, Seongnam-si, KR;

Duck-hwan Kim, Goyang-si, KR;

Jong-seok Kim, Gyeonggi-do, KR;

Sung-hoon Choa, Seoul, KR;

In-sang Song, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
Abstract

A RF system which includes a silicon substrate formed with at least one via-hole filled with conductive material so that both sides of the silicon substrate are electrically connected with one another; at least one flat device formed on one side of the silicon substrate; and at least one RF MEMS device formed on the other side of the silicon substrate.


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