The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2010
Filed:
Jun. 30, 2005
Timothy John Legat, McKinney, TX (US);
Alexander Noam Teutsch, Murphy, TX (US);
Ross Elliot Teggatz, McKinney, TX (US);
Thomas Richard Maher, Rehoboth, MA (US);
Timothy John Legat, McKinney, TX (US);
Alexander Noam Teutsch, Murphy, TX (US);
Ross Elliot Teggatz, McKinney, TX (US);
Thomas Richard Maher, Rehoboth, MA (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
The formation of a semiconductor sensing device is disclosed, where the device can be used to sense pressure, for example. The device is formed by etching the entire backside of a semiconductor substrate or wafer. This streamlines the fabrication process by omitting a number of steps that would otherwise be required to selectively etch certain locations of the substrate. This also improves device performance and compactness by allowing associated support circuitry to be formed closer to a sensing region, and more particularly piezoelectric elements of the sensing region.