The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2010
Filed:
Sep. 30, 2005
Applicant:
Moon Gi Lim, Chungcheongnam-do, KR;
Inventor:
Moon Gi Lim, Chungcheongnam-do, KR;
Assignee:
LOT Vacuum Co., Ltd., Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 23/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is a dry vacuum pump for evacuating a processing chamber in a semiconductor or display manufacturing device, or for evacuating gaseous substance and/or byproducts generated in the process chamber. The dry vacuum pump does not need a partition wall between the roots rotor and the screw rotor. A space is formed at the under sides of the roots rotor and the screw rotor to contain the object substance therein.
Quick Actions:
Lim, Moon. (2010). Composite dry vacuum pump having roots rotor and screw rotor (U.S. Patent No. 7722332). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7722332
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile