The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 25, 2010

Filed:

Feb. 20, 2006
Applicants:

Masahiro Matsumoto, Hitachi, JP;

Hiroshi Nakano, Hitachi, JP;

Masamichi Yamada, Hitachinaka, JP;

Keiji Hanzawa, Mito, JP;

Izumi Watanabe, Hitachinaka, JP;

Keiichi Nakada, Schwaig-Oberding, DE;

Yasuhiro Kanamaru, Hitachinaka, JP;

Inventors:

Masahiro Matsumoto, Hitachi, JP;

Hiroshi Nakano, Hitachi, JP;

Masamichi Yamada, Hitachinaka, JP;

Keiji Hanzawa, Mito, JP;

Izumi Watanabe, Hitachinaka, JP;

Keiichi Nakada, Schwaig-Oberding, DE;

Yasuhiro Kanamaru, Hitachinaka, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/68 (2006.01);
U.S. Cl.
CPC ...
Abstract

Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a material having good thermal conductivity, such as silicon or ceramic, with a thin-walled portion (diaphragm). On the surface of the thin-walled portion, the detection element comprises a heat element as a heater heated to a temperature being different to a predetermined extent from the temperature of the air flow to be measured, temperature-detecting resistors as temperature-detecting means on both sides of the heat element, wiring portions formed of electrical conductors that draw signal lines from the heat element and the temperature-detecting resistors and that have a melting point of 2000° C. or higher, and pads.


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