The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2010
Filed:
Feb. 21, 2007
Dov Chartarifsky, Chandler, AZ (US);
Edward T. Laurent, Ambler, PA (US);
Edward L. Malantonio, Conshohocken, PA (US);
Richard D. Sadler, Quakertown, PA (US);
Bahadir Tunaboylu, Chandler, AZ (US);
Dov Chartarifsky, Chandler, AZ (US);
Edward T. Laurent, Ambler, PA (US);
Edward L. Malantonio, Conshohocken, PA (US);
Richard D. Sadler, Quakertown, PA (US);
Bahadir Tunaboylu, Chandler, AZ (US);
SV Probe PTE Ltd., Singapore, SG;
Abstract
An approach is provided for fabricating cantilever probes. The approach generally includes using various techniques to secure a cantilever probe in a manner to allow a tip to be created on the cantilever probe. For example, embodiments of the invention include attaching the cantilever probe to a carrier structure by clamping the cantilever probe to the carrier structure, bonding the cantilever probe to the carrier structure via a post feature on the cantilever probe, or applying a material on the carrier structure and substantially around and in contact with the cantilever probe to affix the cantilever probe to the carrier structure. A probe tip can then be formed on the cantilever probe while the cantilever probe is attached or affixed to the carrier structure. The cantilever probe can then be removed and bonded to a probe substrate.