The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Apr. 26, 2002
Applicant:
Edward C. Stewart, Buda, TX (US);
Inventor:
Edward C. Stewart, Buda, TX (US);
Assignee:
Advanced Micro Devices, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and an apparatus for routing a semiconductor wafer to at least one of a plurality of processing tools based upon tool performance. Data relating to a performance of a first processing tool and a performance of a second processing tool is acquired. A semiconductor wafer is routed to one of the first processing tool or the second processing tool based upon a comparison between the performance of the first processing tool and the performance of the second processing tool using a controller.