The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Apr. 23, 2007
Jon V. Osborn, Thousand Oaks, CA (US);
Josh A. Conway, Redondo Beach, CA (US);
Jesse D. Fowler, Laguna Niguel, CA (US);
Jon V. Osborn, Thousand Oaks, CA (US);
Josh A. Conway, Redondo Beach, CA (US);
Jesse D. Fowler, Laguna Niguel, CA (US);
The Aerospace Corporation, El Segundo, CA (US);
Abstract
A stroboscopic imaging interferometer system includes an environmental chamber having a novel viewing window equipped with a rigidly integrated beam splitter and piezo actuated reference mirror for illuminating a device providing an object beam and reference mirror for providing a reference beam, upon the reflection of both beams, produces interference of the object beam by the reference beam for providing absolute phase observations of the device, that may be a MEMS device under test.