The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
May. 30, 2006
Mitsuhiro Yoda, Nagano, JP;
Keiji Isamoto, Aichi, JP;
Hiroshi Toshiyoshi, Kanagawa, JP;
Abstract
An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portionsandsecured to a supporting substratethrough a spacer, fixed portionsandsecured to the supporting substratewith no intervention of the spacer, fixed comb electrodesandintegrally formed the fixed portionsandand meshing with movable comb electrodesandin a spaced-apart relationship, and bridge portionsandfor connecting the fixed portionsandto the second supporting portionsand. The fixed portionsandare affixed to the supporting substratein a condition that they are deflected toward the supporting substratewith respect to the second supporting portionsandwhile bending the bridge portionsand, thereby initially deflecting the fixed comb electrodesandso as to be out of alignment with the movable comb electrodesandin a thickness direction of the supporting substrate