The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Feb. 01, 2005
Applicants:
Markus Burgmair, Regensburg, DE;
Ignaz Eisele, Icking, DE;
Thorsten Knittel, Pentling, DE;
Inventors:
Assignee:
Micronas GmbH, Freiburg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01); H01L 33/00 (2010.01); G01N 7/00 (2006.01); G01N 9/00 (2006.01); G01N 19/10 (2006.01); G01N 25/00 (2006.01); G01N 29/02 (2006.01); G01N 27/00 (2006.01); G01N 31/00 (2006.01); G01N 33/00 (2006.01); G01N 35/00 (2006.01); G01N 37/00 (2006.01); G01P 15/00 (2006.01); G01P 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention concerns a sensor with silicon-containing components from whose sensitive detection element electrical signals relevant to a present analyte can be read out by means of a silicon semiconductor system. The invention is characterized in that the silicon-containing components are covered with a layer made of hydrophobic material in order to prevent unwanted signals caused by moisture.