The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2010

Filed:

Apr. 04, 2006
Applicants:

Zuruzi Abu Samah, Santa Barbara, CA (US);

Noel C. Macdonald, Santa Barbara, CA (US);

Marcus Ward, Goleta, CA (US);

Martin Moskovits, Santa Barbara, CA (US);

Andrei Kolmakov, Buellton, CA (US);

Cyrus R. Safinya, Santa Barbara, CA (US);

Inventors:

Zuruzi Abu Samah, Santa Barbara, CA (US);

Noel C. MacDonald, Santa Barbara, CA (US);

Marcus Ward, Goleta, CA (US);

Martin Moskovits, Santa Barbara, CA (US);

Andrei Kolmakov, Buellton, CA (US);

Cyrus R. Safinya, Santa Barbara, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/469 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method and device of nanostructured titania that is crack free. A method in accordance with the present invention comprises depositing a Ti film on a surface, depositing a masking layer on the Ti film, etching said masking layer to expose a limited region of the Ti film, the limited region being of an area less than a threshold area, oxidizing the exposed limited region of the Th.ucsbi film, and annealing the exposed limited region of the Ti film.


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