The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Jan. 02, 2008
Eric NG, Mountain View, CA (US);
Eric Ng, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A robotic end effector or blade suitable for transferring a substrate in a processing system is provided. In some embodiments, an end effector can include a body having opposing mounting and distal end, the body fabricated from a single mass of ceramic. The body can include a pair of arcuate lips extending upward from an upper surface of the body. Each lip is disposed on a respective finger disposed at the distal end of the body. An arcuate inner wall extends upward from the upper surface at the mounting end of the body. The inner wall and lips define a substrate receiving pocket. A plurality of contact pads extend upward from the upper surface of the body for supporting the substrate thereon. A recess is formed in a bottom surface of the body to accommodate a mounting clamp.