The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Jul. 05, 2006
Hideryo Matsudo, Saitama, JP;
Shigeto Yotuya, Saitama, JP;
Jun Katase, Saitama, JP;
Takahiro Ohtsuka, Saitama, JP;
Hideryo Matsudo, Saitama, JP;
Shigeto Yotuya, Saitama, JP;
Jun Katase, Saitama, JP;
Takahiro Ohtsuka, Saitama, JP;
Nihon Dempa Kogyo Co., Ltd., Shibuyo-ku, JP;
Abstract
A manufacturing method produces an angular velocity sensor element easily with a high degree of accuracy. The manufacturing method includes forming a number of tuning fork shaped crystal elements on a single crystal wafer by a photo-etching technique, the crystal elements having protrusion ridge line sections in the lengthwise direction of +X faces of the crystal, caused by etching anisotropy. A step is included for forming a metallic film on each side face including both principal planes and said +X face of said tuning fork shaped crystal element of the single crystal wafer. The method also includes dividing the metallic film of the +X face along the protrusion ridge line section and forming first and second sensor electrodes.