The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Mar. 05, 2007
Zheng Yan, Sunnyvale, CA (US);
BO LI, Sunnyvale, CA (US);
Wayne Chen, Sunnyvale, CA (US);
Tony Young, Sunnyvale, CA (US);
Ning LI, Sunnyvale, CA (US);
Jianbo Gao, Sunnyvale, CA (US);
Zheng Yan, Sunnyvale, CA (US);
Bo Li, Sunnyvale, CA (US);
Wayne Chen, Sunnyvale, CA (US);
Tony Young, Sunnyvale, CA (US);
Ning Li, Sunnyvale, CA (US);
Jianbo Gao, Sunnyvale, CA (US);
3i Systems Corporation, Santa Clara, CA (US);
Abstract
Automatic optical inspection (AOI) systems are described comprising optical modules that include an illumination component and a lens array configured to direct illumination of the illumination component at a portion of a substrate. The lens array includes a Fresnel lens. The optical module includes a camera that receives reflected light resulting from an interaction of the illumination and the substrate. The camera includes a time delay integration (TDI) sensor. A telecentric imaging lens directs reflected light from the substrate to the camera. The illumination component comprises a controller coupled to multiple LED light sources, each emitting light at a different wavelength. The controller independently controls each LED light source. The illumination component includes a bright field and/or a dark field light source. The illumination component can include a front side and/or a back side light source. An optical fiber is coupled to the camera and an image processor.