The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Dec. 22, 2006
Applicants:
Kenichi Tokano, Kawasaki, JP;
Hiroyuki Sugaya, Tokyo, JP;
Inventors:
Kenichi Tokano, Kawasaki, JP;
Hiroyuki Sugaya, Tokyo, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device, including a first semiconductor layer of the first conductivity type having a plurality of trenches formed therein. A second semiconductor layer of the second conductivity type composed of an epitaxial layer is buried in the trenches in the first semiconductor layer. The trench has surface orientations including a surface orientation of a sidewall at an upper stage made slower in epitaxial growth speed than a surface orientation of a sidewall at a lower stage.