The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Oct. 03, 2006
Applicants:
Ralph Steiner Vanha, Zürich, CH;
Tommasso Francesco Cilento, Emmenbrücke, CH;
Inventors:
Ralph Steiner Vanha, Zürich, CH;
Tommasso Francesco Cilento, Emmenbrücke, CH;
Assignee:
Sensirion AG, Stafa, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A sensor integrated on a semiconductor device (), in particular a flow sensor, comprises a measuring element () on a membrane (). In order to prevent a buckling of the membrane () a tensile coating () is applied. The coating covers the membrane, but it preferably leaves all the active electronic components integrated on the semiconductor chip () uncovered, such that their electrical properties are not affected.