The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Sep. 01, 2006
Gert Friis Eriksen, Greve, DK;
Karsten Dyrbye, Silkeborg, DK;
Heins K. Pedersen, Bjerringbro, DK;
Robert M. Mehalso, Fairport, NY (US);
Stephen F. Pond, Williamsburg, VA (US);
Gert Friis Eriksen, Greve, DK;
Karsten Dyrbye, Silkeborg, DK;
Heins K. Pedersen, Bjerringbro, DK;
Robert M. Mehalso, Fairport, NY (US);
Stephen F. Pond, Williamsburg, VA (US);
Grundfos a/s, Bjerringbro, DK;
Abstract
A differential pressure sensor includes a micro-electromechanical sensor die fabricated as a plurality of sensor die sites on a semiconductor wafer, and then singularized, the sensor die having a top face surface including die electrical output pads exposed to a first test fluid source and a bottom side surface exposed to a second test fluid source. The differential pressure further has a sensor die support member having a die support member fluid access port with a support member port perimeter; wherein one of the top face surface or the bottom side surface is sealed fully around the support member port perimeter by a wafer scale seal formed on the plurality of sensor die sites before die singulation. Wafer scale seals may be formed by a photofabrication process, screen printing, stamp printing, or pressure transfer printing. Some embodiments may include a photofabricated seal formed by a photosensitive polydimethylsiloxane material, by a filled photofabricated mold, and by photopatterned glass frit.