The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Apr. 23, 2004
Applicants:
Masahiro Goto, Tsukuba, JP;
Akira Kasahara, Tsukuba, JP;
Masahiro Tosa, Tsukuba, JP;
Kazuhiro Yoshihara, Tsukuba, JP;
Inventors:
Masahiro Goto, Tsukuba, JP;
Akira Kasahara, Tsukuba, JP;
Masahiro Tosa, Tsukuba, JP;
Kazuhiro Yoshihara, Tsukuba, JP;
Assignee:
National Institute for Materials Science, Tsukuba-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 9/00 (2006.01); H05H 1/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
A copper oxide thin film mainly containing CuO is formed by a plasma film-forming process on a substrate for film formation. The friction coefficient of the copper oxide thin film can be controlled remarkably low.