The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
May. 27, 2005
Applicants:
Felix Beyeler, Regensdorf, CH;
Bradley J. Nelson, Zumikon, CH;
Yu Sun, Toronto, CA;
Inventors:
Assignee:
Eth Zuerich, Zurich, CH;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
Abstract
A capacitive transducer a first part containing a first set of capacitor plates and a second part relatively movable in a plane to the first part. The second part contains a second set of capacitor plates. Both sets of capacitor plates are built on a substrate, wherein the capacitor plates form a plurality of capacitors. The second part is relatively movable in all six degrees of freedom. One set of the plurality of capacitors measures displacements in a plane and a second set of the plurality capacitors measures displacements perpendicular to the plane.