The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2010
Filed:
Jan. 23, 2008
Applicants:
Jeongsik Sin, Keller, TX (US);
Woo Ho Lee, Flower Mound, TX (US);
Inventors:
Jeongsik Sin, Keller, TX (US);
Woo Ho Lee, Flower Mound, TX (US);
Assignee:
Board of Regents, The University of Texas System, Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/45 (2006.01);
U.S. Cl.
CPC ...
Abstract
A device in miniature and fabrication of such a device for interferometric use is described, the device including a substrate with at least one deep reactive ion etching structure on at least one surface of the substrate forming an optical bench. The optical bench preferably comprises a moving stage, an actuator, one or more connector sockets and one or more optical components.