The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 04, 2010

Filed:

Mar. 29, 2006
Applicants:

Kazuhiko Itaya, Yokohama, JP;

Ryoichi Ohara, Kawasaki, JP;

Kenya Sano, Kawasaki, JP;

Takaaki Yasumoto, Kanagawa, JP;

Naoko Yanase, Kawasaki, JP;

Inventors:

Kazuhiko Itaya, Yokohama, JP;

Ryoichi Ohara, Kawasaki, JP;

Kenya Sano, Kawasaki, JP;

Takaaki Yasumoto, Kanagawa, JP;

Naoko Yanase, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01);
U.S. Cl.
CPC ...
Abstract

A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first electrode; and a second electrode placed on the piezoelectric film, the second electrode having a periphery partially overlapping on the cavity and tapered to have an inner angle of 30 degrees or smaller defined by a part of the periphery thereof and a bottom thereof.


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